🌿 lithos(@lithos_graphein):Entegris is pushing their Mo precursors for advanced node metallization. "Molybdenum (Mo) is a promising metal for contacts and local interconnects because it offers a combination of low resistivity, high melting point, excellent thermal and chemical stability, and good electromigration resistance. It also is barrierless. This makes molybdenum well suited for advanced nodes, where traditional materials like Cu and W face scaling limitations."

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参加 November 2022

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🌿 lithos@lithos_graphein

2026.05.18 23:54

Entegris is pushing their Mo precursors for advanced node metallization. "Molybdenum (Mo) is a promising metal for contacts and local interconnects because it offers a combination of low resistivity, high melting point, excellent thermal and chemical stability, and good electromigration resistance. It also is barrierless. This makes molybdenum well suited for advanced nodes, where traditional materials like Cu and W face scaling limitations."