The ASML high-NA EUV Lego Set is extremely rare and only available to employees from the company store. But there are directions and a full 800-piece parts list on rebrickable. It's not exactly what ASML offers, but the modifications are tasteful. Many of these bricks are hard to source, so I made my own version. I do a tool install every Christmas over my fireplace. It's almost that magical time of year again.