ASML’s customers are adding capacity at existing fabs by upgrading the lithography systems already in place.
Its Installed Base Management business, which includes services and field options, generated €3.3 billion in Q3 revenue, nearly €400 million above guidance. ASML attributed the beat mainly to strong demand for EUV and DUV productivity upgrades.
CFO Roger Dassen said high-margin contributions from the business helped ASML’s overall gross margin come in above guidance at 57.5%. The company expects Installed Base Management revenue of about €3.7 billion in Q4.