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加入 November 2022
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Re: High-NA Chips in Production. This means an alternate runpath to the POR multipatterning process. It's common to have competing integration flows for some modules. It allows the fabs to directly compare yield, cost, and cycle time for the new process. For memory, they may even allocate a portion of the WIP to the competing flow and sell it if it yields, although that's rare.
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