ASML is exploring ways to expand capacity in 2028 beyond the 30% increase it previously outlined for low-NA EUV and DUV immersion systems.
The Dutch lithography equipment maker said in its Oct. 14 earnings release that its planned supply would fall short of customer demand in both 2027 and 2028.
Q3 revenue came in at €11.66 billion, with a gross margin of 57.5%. ASML expects Q4 revenue of €14.2 billion to €15.2 billion.