tphuang(@tphuang):AMEC has started delivery of Primo Domingo, gas-phase high-selectivity etcher. Designed for GAA, 3D NAND & 3D DRAM, specifically to remove material in nanoscale 3D structures while leaving neighbors untouched. >700:1 SiGe/Si selectivity in lab verification. I wonder who the customer is?

tphuang

@tphuang

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tphuang@tphuang

2026.10.22 18:31

AMEC has started delivery of Primo Domingo, gas-phase high-selectivity etcher. Designed for GAA, 3D NAND & 3D DRAM, specifically to remove material in nanoscale 3D structures while leaving neighbors untouched. >700:1 SiGe/Si selectivity in lab verification. I wonder who the customer is?